Introduction to Microscale and Nanoscale Manufacturing

MAE M183B. Introduction to Microscale and Nanoscale Manufacturing (Instructor: Prof. Ju, Y-S.) (Same as Biomedical Engineering CM150 and Elec­trical Engineering CM150.) Lecture, four hours; dis­cussion, one hour; outside study, seven hours. Req­uisites: Chemistry 20A, 20L, Physics 1A, 1B, 1C, 4AL, 4BL. Corequisite: course CM180L. Introduction to micromachining technologies and microelectrome­chanical systems (MEMS). Methods of micromachin­ing and how these methods can be used to produce variety of MEMS, including microstructures, mi­crosensors, and microactuators. Students design mi­crofabrication processes capable of achieving de­sired MEMS device. Concurrently scheduled with course CM280A. Letter grading.